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Sekidenko 401M Series
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High-speed, mid-wave, non-contact optical pyrometer with embedded EtherCAT capability.
Advanced Energy’s 401M Optical Pyrometer extends the flexibility of the Sekidenko product family into the mid-IR wavelength range, from 1.7 µm to 5.2 µm. The 401M offers a single-channel temperature measurement capability for thin-film solar, glass, and advanced semiconductor processes. The 401M supports EtherCAT, USB, Serial and analog data interfaces. Because of its compact design, the 401M can easily meet small-footprint requirements of many demanding process applications.
Features
• Built-in EtherCAT capability.
• High-speed (up to 1kHz).
• Non-contact temperature measurement with lens-based optics
• Automatic ambient thermal correction
• Industry-leading temperature range and read rates
• Highly flexible, module-based platform architecture
• Full I/O and external trigger/synchronization capability
• High-speed (up to 1kHz).
• Non-contact temperature measurement with lens-based optics
• Automatic ambient thermal correction
• Industry-leading temperature range and read rates
• Highly flexible, module-based platform architecture
• Full I/O and external trigger/synchronization capability
Benefits
• Improves temperature measurement accuracy for critical processes
• Enhances process repeatability and minimizes variation
• Increases productivity, yield, and throughput
• Increases stability and reliability across multiple chambers and substrate materials
• Enhances process repeatability and minimizes variation
• Increases productivity, yield, and throughput
• Increases stability and reliability across multiple chambers and substrate materials
Specifications
| Operational temperature range (°C): | 15 to 40°C |
|---|---|
| Spectral Range (µm): | 1.7um – 6um (2.7, 3.3, & 5.2um typical) |
| FOV (minimum spot size) (mmm): | ≥1mm |
| Alignment / Sighting: | Sighting: None. Alignment: Mechanical alignment included in front housing |
| Interface / Output (mA): | Analog Out (4-20mA, 0-10V), ECAT, Serial / C, F, K |
| Accuracy: | ±3 °C (2.7 & 3.3um) ±5 °C (5.2um) |
| Measurement Range: | 50 to 1300C |
| Measurement Accuracy (%): | ±3 °C (2.7 & 3.3um) ±5 °C (5.2um) |
Technical Documentation
Product Information Documents
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