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Navigator II FCi Match Network


Agile, Precise Power Delivery for Demanding High-Speed Matching Applications

The Navigator® II FCi is a standalone, microprocessor-controlled impedance matching network. Incorporating tuning elements adjusted by discrete solid-state switched capacitor arrays, the matching network is driven by the need to achieve fast, ac­curate tuning across wider impedances. With a similar form, footprint, and tuning ranges as traditional counterparts, these matches offer tuning times in the millisecond range compared with the one-second range typical of traditional matching networks. This high-speed matching technology is optimized and suited for critical, power sensitive, short duration plasma process steps such as Atomic Layer Etch (ALE).

When configured for full-range tuning, the Navigator FCi can cover an impedance space identical to that of a vacuum capacitor match. The com­pactness of solid-state circuitry allows the match to fit within a similar footprint of the conventional version. With no moving mechanical parts, this match eliminates wear and drift mechanisms inherent to traditional matches. This enables higher reliability and repeatability on a broad range of challenging and continually varying plasma processes.


  • 13.56 MHz
  • CW and pulse operation
  • Output measurement sensor
  • Air cooled


  • Achieve fast, accurate tuning across a wide impedance range
  • Improve reliability and repeatability
  • Reduce power delivery interruption and “winking-out” of plasma
  • Utilize technology for short process steps, such as ALE applications


Cooling: Air
Output Frequency (MHz, kHz): 13.56 MHz
Input Voltage (V): 24 VDC or 110 VAC
Power Level (kW): 1.5 kW
Rack Width: N/A, chamber mounted
Communications Interface: EtherCAT, Ethernet
Advanced Features: Pulsing, CEX
Process Applications: Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE

Technical Documentation


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We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

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