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Paramount HFi RF Power Delivery System


Compact, Cost-Effective Integrated Generator and Solid-State Matching RF Power Delivery System

The Paramount® HFi is an integrated RF delivery solution for deposition and other semiconductor plasma-based processes. An electrically switchable solid-state capacitor array is physically integrated with the RF power amplifier providing the most compact form-factor power delivery system available. With an overall package size nearly equal to that of a traditional RF power generator, this design also includes the matching network within the common enclosure. The matching network, with 32 tune range positions, allows for reliable RF power delivery across a wide range of impedances. 

In addition to a reduced footprint, mechanically driven vacuum capacitors are replaced in the integrated matching network with solid state components for increased reliability and repeatability—crucial attributes in high-cycle, repetitive pro­cesses. By elim­inating the traditional stand-alone vacuum capacitor matching network, very fast tuning and direct power regulation are achieved, reducing latency in today’s short-cycle, high step-count deposition processes.


  • 32 tune range positions with millisecond switching speeds to enable the shortest process steps
  • Controllable tune range positions optimize the impedance range to customer process
  • Water-cooled with no requirements for external air exchange
  • Common exciter (CEX) mode to sync multiple systems in cluster configurations
  • RS-232, Ethernet, and EtherCAT communication


  • Utilize faster tuning speeds to enables stable performance even in the shortest process steps
  • Decrease costs with integrated package configuration when compared to separate generator and matching network
  • Free up valuable real estate on multi-wafer chamber deposition systems with reduced footprint


Cooling: Water
Output Frequency (MHz, kHz): 13.56 MHz
Input Voltage (V): 208 VAC
Power Level (kW): 3 kW
Rack Width: N/A, chamber mounted
Communications Interface: RS-232, 25-pin analog, Ethernet, EtherCAT
Advanced Features: CEX
Process Applications: Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE

Technical Documentation


Calibration and Alignment

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Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.


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We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

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