Amplifiers and Voltmeters for Semiconductor Applications
For semiconductor wafer processing, Advanced Energy's Trek amplifiers are ideal for ion/electron beam deflection, steering, and electrostatic and Johnsen-Rahbek wafer clamping. You can also use our non-contacting voltmeters to precisely measure the work function of conducting surfaces and the surface potential of semiconductor wafers.
To help guide your selection process, view our recommended amplifiers and voltmeters for specific semiconductor processes.
E-Chuck Power Supplies
Advanced Energy's Trek amplifiers are used to apply AC and DC voltages to the electrode(s) of coloumbic or Johnsen-Rahbek electrostatic chucks which are used to clamp semiconductor wafers or flat panel displays during device processing and handling operations.
Electrostatic Deflection of Charged Particle Beams
Our Trek high voltage amplifiers are used to sweep the voltage applied to electrostatic deflection plates to precisely control the position of the charged particle beam strike on semiconductor devices.
Ion Source Power Supplies
Advanced Energy's Trek high voltage power supplies/amplifiers are used to control the voltage level of electrodes in ion sources. The four-quadrant capability allows very stable control of the output voltage level with these active loads, and an ability to quickly ramp (up and down) the voltage level.
Corona Charging Supplies
Our Trek high voltage power supplies/amplifiers can control the voltage or current applied to corona generators used to apply a precise amount of charge to semiconductor wafers or flat panel displays.
Work Function Measurements
Use our Trek non-contacting electrostatic voltmeters to precisely measure the work function (contact potential) associated with conducting surfaces.
Wafer and Thin Film Potential Measurements
Utilize our Trek non-contacting electrostatic voltmeters to precisely measure the surface potential and voltage of semiconductor wafers, which corresponds to the charge level of thin films.