Navio | Advanced Energy
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Economical, Digital, Configurable Matching Network Solution

The Navio matching network delivers quick, accurate, and repeatable impedance across many applications.
  • Plug-and-play installation with Advanced Energy’s RF power supplies for thin film applications
  • Efficient and stable power delivery
  • Compact and air-cooled (standard package or slim version)


  • Quick, accurate, and repeatable impedance matching
  • Optimized, off-the-shelf functionality for many applications
  • Generous menu of configuration options for more sophisticated processes
  • Wide power and frequency ranges
  • Compact air-cooled unit available in a standard or slim version


  • Improve throughput, increase yield, and reduce production costs
  • Choose a standard model or configure a unit that meets your system requirements
  • Install and operate with ease
  • Obtain excellent repeatability for high process yield


Kühlung: Air
Ausgangsfrequenz (MHz, kHz): 13 MHz
Eingangsspannung (V): 24 VDC or 110 VAC
Leistungsstufe (kW): 1 to 5 kW
Rack Breite: N/A, chamber mounted
Kommunikationsschnittstelle: Analog, RS 232
Anwendungen verarbeiten: Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE

Technische Dokumentation

Vergleichen Sie

Model Navio Navigator II
Leistungsstufe (kW) 1 to 5 kW 1 to 60 kW
Kommunikationsschnittstelle Analog, RS 232 EtherCAT, Ethernet, DeviceNet, RS-232
Erweiterte Funktionen Pulsing, CEX
Anwendungen verarbeiten Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE


Calibration and Alignment

Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications.  Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards​.

Agreement Term Options

Exchange Program

Set up a custom exchange program of managed spares to reduce capitial equipment investment and minimize downtime associated with routine maintenance and repair.


Extend product life and reduce mean time between failure by replacing time-dependent components during reactive or preventative maintenance. Get the performance you would expect at the time of original manufacture for a fraction of the cost of a new unit


Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.

Agreement Term Options

Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

Agreement Term Options

Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

Agreement Term Options

Trade In

Leverage your original investment and reduce the cost of a new unit by trading in your old unit.

Upgrades & Enhancements

Take advantage of the latest engineering innovations to optimize long-term product performance. Add custom-engineered solutions to utilize new feature sets and functionality

Used Equipment

We have a catalog of high-quality current, and legacy used products that have been fully tested and maintained. These products are covered under warranty with options available for extended warranty as well.

24/5 Support verfügbar

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Wir sind bestrebt, unseren Kunden einen hervorragenden Kundendienst und technischen Support zu bieten. Mit Live-Chat und Telefon-Support können Sie jederzeit einen qualifizierten Techniker um Hilfe bitten.
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