Resource Library
White papers, data sheets, videos, etc. — they’re all here. Search by type, solution, and/or product category.
White Papers
Advanced Ignition RPS White Paper
This paper describes Xstream, which utilizes pulsed power for ignition and a transformer induced power delivery system during chamber cleaning operations.
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Data Sheets
Xstream RPS Data Sheet
Xstream remote plasma source has an active matching network fully integrated plasma source platform for high-flow and high-pressure, reactive-gas processes.
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Digital Assets
Semiconductor Manufacturing: How We Power the Process
Explore how we power the process. Our semiconductor portfolio offers innovative and reliable power products for electrostatic chucks (ESC), inspection, ion implant as well as etch and deposition.
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White Papers
RPS Chamber Anodization White Paper
Our Xstream platform virtually eliminates the formation of aluminum fluoride particles, providing reliable, particle-free, remote CVD chamber cleaning.
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