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Paramount RF Generator
Industry-Leading, Repeatable Power Delivery for Core Plasma Applications
Advance your process development with a new focus on operating flexibility. Paramount® HF RF generators offer wide power ranges, support multiple integration scenarios, and are equipped with standard serial/analog interfaces and other optional communication interfaces. The Paramount HF enables high plasma density and ion energy required by high aspect ratio devices and speeds process for the next node of semiconductor processing tools. The Paramount platform’s digital architecture provides precise power management and streamlines new function integration — no lead times or hardware changes needed. High-power output and repeatable performance is achieved by real-time detection of plasma changes. And internal-protection limits facilitate reliable operation.
Features
- Full digital control
- Frequency tuning, pulsing, and pulse synchronization
- Real-time power and impedance measurement
- Arc management
- Phase synchronization (CEX)
Benefits
- Enhance plasma stability and process repeatability
- Precisely control RF power
- Quickly respond to plasma changes
- Easily adapt to meet specific application needs
Specifications
| Cooling: | Hybrid (air and water) |
|---|---|
| Output Frequency (MHz, kHz): | 2 to 60 MHz |
| Input Voltage (V): | 208, 400, 480 VAC |
| Power Level (kW): | 3 to 15 kW |
| Rack Width: | Half and Full rack |
| Height (Inches): | 3U |
| Communications Interface: | EtherCAT, Ethernet, DeviceNet, RS-232 |
| Advanced Features: | Pulsing, CEX, arc management, MBFT |
Featured Resources
Apex and Paramount RF Generator Comparison
Paramount Implanter Tools
Paramount Series Data Sheet
Paramount HF RF Power Delivery Systems offer precise RF control to enable rapid plasma changes, while its flexible digital architecture, wide output coverage, and comprehensive feature set facilitate process customization. Download Paramount HF Brochure to discover how the RF Power Delivery Systems meet your needs.
Technical Documentation
Services
Premium Services
Combine services into a cost-effective plan including warranties, on-site visits, and more.
Repair
Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.
Calibration and Alignment
Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications. Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards.
Upgrades & Enhancements
Take advantage of the latest engineering innovations to optimize long-term product performance. Add custom-engineered solutions to utilize new feature sets and functionality
Conversion
Convert your outdated AE unit to a newer version to extend product life and add new features for a fraction of the cost of a new purchase
Refurbishments
Choose refurbishment over repair to minimize down time, extend life, and reduce the total cost of ownership of your mature power products.
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
