Plasma Power Generators

PEII Series

Low-Frequency Series with Enhanced Arc Control and Internal Load Matching for 40 kHz Reactive Sputtering Applications

The PEII series of power supplies are the trusted standard for dual-magnetron sputtering, as an effective vacuum cleaning tool, and in multiple PECVD applications.

  • Reliable water-cooled design
  • Delivers tight output regulation on power, voltage, or current, with a measurement accuracy of 1%
  • Compatible with a programmable logic controller (PLC)
  • Overview
  • Technical Specs
  • Service & Support

Overview

The low-frequency PEII series provides 40 kHz pulse width modulation (PWM). It features advanced arc control and internal load matching with outputs of up to 60 kW when units are combined — requiring no external hardware, such as transformers or tuners. The power supply also offers two distinct arc-handling circuits, and the floating output can be grounded on either side. PEII power supplies are water-cooled, are CE compliant, and include many optional accessories. 

Benefits

  • Proven reliability enables maximum system utilization
  • Accurate power, voltage, or current regulation
  • Maximum flexibility and modularity 
  • Enhanced arc control 
  • Wide tap range

Features

  • 5 and 10 kW options (primary/secondary up to 60 kW)
  • Internal load match (10:1 impedance range)
  • Two distinct arc-handling circuits
  • Efficient, compact, water-cooled design
  • CE compliant
  • Compatible with Advanced Energy’s LMII 10K matching network allowing higher voltage operation
  • Power

    5 and 10 kW models (primary/secondary capable for higher powers) 

  • Output Frequency

    40 kHz 

  • Voltage Range

    300 to 950 V via seven selectable taps 

  • ARC Management

    Both voltage and current detection 

  • Cooling

    Water 

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

Call
Within the U.S.:
800.446.9167 (option 2)
Outside the U.S.:
+1.970.221.0108 (option 2)

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