Plasma Power Generators

Ascent DMS

Advanced Dual-Magnetron Sputtering Accessories

A field-proven solution for any dual-magnetron sputtering application with additional capabilities facilitating advanced process innovation.

  • Achieve higher deposition rates with a more stable process through advanced ARC management
  • Tune your process with variable frequency and duty cycle
  • Tailor to your system requirements: 30, 40, and 60 kW units configurable up to 180 kW
  • Overview
  • Technical Specs
  • Service & Support

Overview

The Ascent® DMS series offers unprecedented power-delivery ease and control for dual-magnetron sputtering, enabling precise tuning of film characteristics. With selectable frequency, regulation mode, and duty cycle, as well as low stored energy and simplified, modular system configuration, the Ascent DMS accessory distinguishes itself as truly next-generation technology. Cost-effective, scalable, and versatile, it minimizes complexity, increases quality, and boosts throughput to enable advanced process innovation. 
 
The Ascent DMS MF-120 package provides cost-effective, mid-frequency power for standard cathodes, while delivering bipolar pulsing technology benefits. 

Benefits

  • Increased film value: Repeatable, customizable deposited films
  • Lower cost of ownership and increased productivity
  • Higher power levels with improved stability and reduced arc damage
  • Easy scalability, integration, and support
  • Modular design allows you to pay for only what you need while enabling future capability expansion

Features

  • Modular and scalable (40, 60, and 120 kW models configurable up to 180 kW)
  • Selectable frequency (500 Hz to 50 kHz)
  • Adjustable duty cycle — independent power ratio regulation for each magnetron
  • Advanced process management through a tiered approach to arc mitigation
  • CEX (phase synchronization)
  • Input Power

    ASCENT DMS 40, 60 KW

    85 to 264 VAC, single  

    ASCENT DMS 120 KW

    85 to 264 VAC, single  

  • Output Voltage

    ASCENT DMS 40, 60 KW

    Up to 1000 V 

    ASCENT DMS 120 KW

    Up to 1000 V 

  • Output Current

    ASCENT DMS 40, 60 KW

    Up to 150 A 

    ASCENT DMS 120 KW

    Up to 400 A (rms)

  • Weight

    ASCENT DMS 40, 60 KW

    ~ 61.5 kg (136 lb) 

    ASCENT DMS 120 KW

    ~ 100 kg (220 lbs) 

  • Mounting

    ASCENT DMS 40, 60 KW

    4.26 cm (19"), rack-mountable, 6U height

    ASCENT DMS 120 KW

    4.26 cm (19"), rack-mountable, 10U height

  • Cooling Air Temperature

    ASCENT DMS 40, 60 KW

    40°C (104°F) max 

    ASCENT DMS 120 KW

    n/a 

  • Cooling Water Temperature

    ASCENT DMS 40, 60 KW

    35°C (95°F) max 

    ASCENT DMS 120 KW

    40°C (104°F) max 

  • Compliance

    ASCENT DMS 40, 60 KW

    EU RoHS, CE, NRTL, SEMI S2, SEMI F47 

    ASCENT DMS 120 KW

    EU RoHS, CE, NRTL, SEMI S2, SEMI F47 

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

Learn More

Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

Learn More

Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

Learn More

Product Support

Call
Within the U.S.:
800.446.9167 (option 2)
Outside the U.S.:
+1.970.221.0108 (option 2)

Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.

Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.