Plasma Power Generators
The MDX Series Enables Low-Power Magnetron Sputtering in a Small and Affordable Package
An industry workhorse, the MDX Series diligently serves low-power applications where robust, accurate power delivery is a must.
- Available in 500 W, 1 kW, and 1.5 kW models
- Excellent process results with low stored energy
- Backed by Advanced Energy's Global Service organization
- Technical Specs
- Service & Support
Tight regulation, superior arc quenching, and low stored output energy make MDX Series DC power supplies an industry leader. Intended for continuous hard use in a vacuum environment, these rugged power supplies are most commonly used as DC magnetron sputtering drives. They also offer tight regulation as bias supplies in RF sputtering and etching systems. Their compact design makes them the primary choice for laboratory systems.
- Tight regulation
- Improved yield
- Reduced target burn-in time
- High reliability
- Easy maintenance and replacement
- Low stored output energy with adjustable arc suppression time
- Low ripple
- Compact design
- Voltage, current, and power regulation modes
- Front panel and analog interface control
500, 1000, and 1500 W
750, 1000, or 1200 VDC
½ rack convenience with 1U (500 W) and 2U (1000 W/1500 W) height
220 and 115 VAC models available
Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.
Global Support & Services
Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.
U.S.: +1 800 446 9167
Asia: +86 29 8874 1895
China: 400 8899 130
EMEA: +44 800 032 1546
U.K.: 08000 321 546
Thin Film Support
Thermal Product Support
Other Technical Support