Plasma Power Generators

MDX Series

The MDX Series Enables Low-Power Magnetron Sputtering in a Small and Affordable Package

An industry workhorse, the MDX Series diligently serves low-power applications where robust, accurate power delivery is a must.

  • Available in 500 W, 1 kW, and 1.5 kW models
  • Excellent process results with low stored energy
  • Backed by Advanced Energy's Global Service organization
  • Overview
  • Technical Specs
  • Service & Support

Overview

Tight regulation, superior arc quenching, and low stored output energy make MDX Series DC power supplies an industry leader. Intended for continuous hard use in a vacuum environment, these rugged power supplies are most commonly used as DC magnetron sputtering drives. They also offer tight regulation as bias supplies in RF sputtering and etching systems. Their compact design makes them the primary choice for laboratory systems.

Benefits

  • Tight regulation
  • Improved yield
  • Reduced target burn-in time
  • High reliability
  • Easy maintenance and replacement

Features

  • Low stored output energy with adjustable arc suppression time
  • Low ripple
  • Compact design
  • Voltage, current, and power regulation modes
  • Front panel and analog interface control
  • Power

    500, 1000, and 1500 W

  • Voltage

    750, 1000, or 1200 VDC

  • Cooling

    Air

  • Size

    ½ rack convenience with 1U (500 W) and 2U (1000 W/1500 W) height

  • AC Input

    220 and 115 VAC models available

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

Call
Inside the U.S.: 1.800.446.9167 (option 2)
Outside the U.S.


Email
Thin Film Support
Thermal Product Support
Other Technical Support

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Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.