Plasma Power Generators

Ascent AMS Series

Stable Power Delivery for Extreme Arc Conditions and Highly Repeatable Films

Advanced Energy’s front-line DC generator provides performance and reliability required in dual-magnetron sputtering applications. 

  • Arcs are actively managed, versus a generic pre-set arc response
    • Less than 0.4 mJ per 1 kW of output energy
    • Stable, repeatable process through arcing conditions
  • Primary/secondary for high power applications
  • Higher power levels with reduced arc damage
  • Overview
  • Technical Specs
  • Service & Support

Overview

As manufacturing techniques advance, new materials and cathode designs pose greater challenges to process stability and film repeatability. Ascent® AMS power supplies deliver stable, repeatable power, regardless of process material or cathode design. The AMS provides advanced arc management, allowing maximum power delivery with faster recovery to process. Extreme fast recovery also means extremely low energy delivered through arcs, preventing substrate damage.

For high power applications, the Ascent AMS can be used in primary/secondary configuration. Common applications include output configurations over 100 kW. However, the combined water/air cooling design keeps the generator footprint to a minimum.

Benefits

  • Obtain high film quality and throughput
  • Reduce film, substrate, and equipment damage
  • Achieve stable throughput and power delivery under extreme arcing conditions
  • Easily integrate and control

Features

  • Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets
  • Set Point Compensation™ technology
  • Arc Sync® technology — primary/secondary up to 12 units
  • Ethernet, EtherCAT®, DeviceNet®, Profibus, RS-232/485, Ethernet/IP, and analog communications
  • AC Input Voltage

    400, 440, and 480 VAC

  • Output Power

    • 30, 40, and 60 kW
    • Primary/secondary configuration available for higher powers
  • Ignition Voltage

    800 to 1200 V

  • Output Voltage

    30 kW

    300 to 1000 VDC 

    40 kW

    333 to 1000 VDC 

    60 kW (120A)

    500 to 1000 VDC 

    60 kW (150A)

    400 to 800 VDC 

  • Available I/O

    Ethernet, EtherCAT®, DeviceNet®, Profibus, RS-232/485, EtherNet/IP, and analog communications

  • Mounting

    48.26 cm (19”), rack mountable, 6U height 

  • Cooling

    Air and water combined 

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

Call
Within the U.S.:
800.446.9167 (option 2)
Outside the U.S.:
+1.970.221.0108 (option 2)

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