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Rapid Ox Remote Plasma Source
Ideal Remote Plasma Source for Oxygen-Based Processes
Features
- Quartz liner makes it ideal for photoresist ashing or carbon chamber clean processes
- Variable frequency matching provides a range of plasma impedance operation, controlled by varying gas chemistry, pressure, and power set point
- Improved thermal management helps ensure long chamber lifetime
- Rapid OX quickly ignites and reaches steady-state operation due to low dynamic pressure overshoot
Benefits
- Significantly reduce downtime and cost of ownership via a removable and replaceable quartz chamber
- Improve process performance thanks to a high dissociation rate and high-density radical generation
- Ensure repeatable, controllable processes with variable frequency tuning and precise power control
- Increase the chamber lifetime and reduce service costs thanks to the reliable design and cooling system
- Improve tool utilization, reduce preventive maintenance, and lower CoO
Specifications
| Cooling: | Hybrid (air and water) |
|---|---|
| Output Frequency (MHz, kHz): | 400 kHz |
| Input Voltage (V): | 208 VAC |
| Power Level (kW): | 6 kW |
| Rack Width: | N/A, chamber mounted |
| Communications Interface: | RS-232, Analog, Ethernet |
| Process Applications: | Chamber Clean |
| Chemical Compatibility: | O2, N2 |
Featured Resources
Technical Documentation
Services
Premium Services
Combine services into a cost-effective plan including warranties, on-site visits, and more.
Repair
Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.
Calibration and Alignment
Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications. Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards​.
Refurbishments
Choose refurbishment over repair to minimize down time, extend life, and reduce the total cost of ownership of your mature power products.
