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RF Generator Calibration
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Ensure accuracy, maximize yield, and reduce downtime with Advanced Energy’s RF calibration products.
Advanced semiconductor manufacturing demands precise RF power control to support finer geometries and denser circuitry. To meet these demands, Advanced Energy provides industry-leading calibration solutions for your RF generators that are essential to maintain accuracy, traceability, and proper operation over time.
Advanced semiconductor manufacturing demands precise RF power control to support finer geometries and denser circuitry. To meet these demands, Advanced Energy provides industry-leading calibration solutions for your RF generators that are essential to maintain accuracy, traceability, and proper operation over time.
Our RF calibration products help semiconductor manufacturers achieve consistent plasma performance, higher yield, and lower operating costs. With scheduled preventative maintenance, you maintain compliance and keep production running efficiently.
High Power RF Power Sensors – ISO17025-accredited, traceable to AE calorimeters, and designed for accuracy at multiple-frequencies. These RF power meters deliver precise power measurements for RF generators, ensuring your processes stay within spec.
RF Diagnostic Cart – A complete mobile solution for in-house RF generator calibration. Equipped with AE-certified tools, it enables fast, reliable calibration without removing generators from the fab floor to minimize downtime and maximize productivity.
Why RF Generator Calibration Is Critical
RF generators are the heartbeat of plasma-based semiconductor processes. Performing routine scheduled maintenance helps to minimize risk, maintain consistency in etch and deposition processes, minimize yield loss, and prevent costly downtime. Regular calibration safeguards your process integrity and increases assurance that each wafer will meet quality requirements.
When To Calibrate RF Generators
Contact Us
Prefer Professional Calibration Services?
If you’d rather not handle calibration in-house, explore our calibration service options.
High Power RF Power Sensors – ISO17025-accredited, traceable to AE calorimeters, and designed for accuracy at multiple-frequencies. These RF power meters deliver precise power measurements for RF generators, ensuring your processes stay within spec.
RF Diagnostic Cart – A complete mobile solution for in-house RF generator calibration. Equipped with AE-certified tools, it enables fast, reliable calibration without removing generators from the fab floor to minimize downtime and maximize productivity.
Why RF Generator Calibration Is Critical
RF generators are the heartbeat of plasma-based semiconductor processes. Performing routine scheduled maintenance helps to minimize risk, maintain consistency in etch and deposition processes, minimize yield loss, and prevent costly downtime. Regular calibration safeguards your process integrity and increases assurance that each wafer will meet quality requirements.
When To Calibrate RF Generators
- After installation or relocation
- During scheduled preventive maintenance
- When process deviations or yield loss occur
- Before audits or certifications
Contact Us
Prefer Professional Calibration Services?
If you’d rather not handle calibration in-house, explore our calibration service options.
