Resource Library
White papers, data sheets, videos, etc. — they’re all here. Search by type, solution, and/or product category.
Data Sheets
Luxtron M-1000 Data Sheet
Advanced Energy's Luxtron® M-1000 FluorOptic® thermometry (FOT) convert platform for semiconductor etch and deposition applications, featuring an advanced light source and improved ultralow noise electronics.
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Brochures
PowerInsight by Advanced Energy Brochure
Transform power delivery data into unique insights with advanced analytics and machine learning techniques.
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Application Notes
MOCVD - LED Chips Application Note
Temperature is one of the most important process parameters in the growth of LED chips on sapphire or SiC substrates.
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Application Notes
Etching and Wafer Fab Equipment Application Note
Etching and wafer fab equipment suppliers are faced with smaller line width and reliability challenges.
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Data Sheets
Ascent AP Data Sheet
Ascent AP provides unprecedented power control for single- and dual-magnetron sputtering.
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White Papers
Forward and Reflected Power: What Does It Mean?
This paper is intended to help understanding and to dispel myths surrounding RF measurements and practice.
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