Resource Library
White papers, data sheets, videos, etc. — they’re all here. Search by type, solution, and/or product category.
Data Sheets
Rapid OX RPS Data Sheet
Rapid OX is the ideal remote plasma source for oxygen-based processes.
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Data Sheets
Navio Data Sheet
The NavioTM matching network leverages Advanced Energy’s power expertise to precisely match complex plasma impedance to your tuning range.
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Multicrystalline Silicon
Temperature measurement of high performance multicrystalline silicon
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Data Sheets
Solvix DC and Pulsed-DC Data Sheet
This is a robust, coordinated suite of power generation specifically designed to enable advanced, high-tech coatings that configures easily with modular DC and pulsed-DC solutions.
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RPS Chamber Anodization White Paper
Our Xstream platform virtually eliminats the formation of aluminum fluoride particles, providing reliable, particle-free, remote CVD chamber cleaning.
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Data Sheets
Pinnacle Series Data Sheet
Pinnacle DC generators enable quality thin films and maximum process efficiency and are the Most Recognized DC Power Supply for <= 20 kW Processes.
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Advanced Ignition RPS White Paper
This paper describes Xstream, which utilizes pulsed power for ignition and a transformer induced power delivery system during chamber cleaning operations.
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Data Sheets
Ascent AP Data Sheet
Ascent AP provides unprecedented power control for single- and dual-magnetron sputtering.
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3 Tips for Sourcing Chamber Cleaning RPS Systems
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Advanced Energy Product Portfolio
We build industry-specific expertise into every solution and deliver manufacturing solutions that create an advantage for our customers.
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