White papers, data sheets, videos, etc. — they’re all here. Search by type, solution, and/or product category.
Solvix DC and Pulsed-DC Data Sheet
This is a robust, coordinated suite of power generation specifically designed to enable advanced, high-tech coatings that configures easily with modular DC and pulsed-DC solutions.View Resource
RPS Chamber Anodization White Paper
Our Xstream platform virtually eliminats the formation of aluminum fluoride particles, providing reliable, particle-free, remote CVD chamber cleaning.View Resource
Advanced Ignition RPS White Paper
This paper describes Xstream, which utilizes pulsed power for ignition and a transformer induced power delivery system during chamber cleaning operations.View Resource