Resource Library
White papers, data sheets, videos, etc. — they’re all here. Search by type, solution, and/or product category.
Data Sheets
Ascent AP Data Sheet
Ascent AP provides unprecedented power control for single- and dual-magnetron sputtering.
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White Papers
Advanced Ignition RPS White Paper
This paper describes Xstream, which utilizes pulsed power for ignition and a transformer induced power delivery system during chamber cleaning operations.
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Data Sheets
Ascent AMS Data Sheet
Ascent AMS provides stable power delivery through extreme arc conditions for highly repeatable films.
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Data Sheets
Pinnacle Plus Data Sheet
Process-Proven, Pulsed DC for Single-Magnetron Reactive Sputtering of Thin Dielectric Films: Pinnacle Plus+ generators deliver DC power in a pulsing configuration enabling reactive sputtering of extremely uniform, high-quality dielectric films.
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Data Sheets
Xstream RPS Data Sheet
Xstream remote plasma source has an active matching network fully integrated plasma source platform for high-flow and high-pressure, reactive-gas processes.
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White Papers
Embracing Design for Reliability White Paper
Learn how industry trends drive demand for increased quality and capacity as well as the Design for Reliability (DfR) process.
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Data Sheets
Ascent DMS Data Sheet
The Ascent DMS series offers unprecedented power delivery ease and control for dual-magnetron sputtering, enabling precise tuning of film characteristics.
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Data Sheets
Navio Data Sheet
The NavioTM matching network leverages Advanced Energy’s power expertise to precisely match complex plasma impedance to your tuning range.
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Data Sheets
Rapid OX RPS Data Sheet
Rapid OX is the ideal remote plasma source for oxygen-based processes.
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