Resource Library
White papers, data sheets, videos, etc. — they’re all here. Search by type, solution, and/or product category.
Data Sheets
Pinnacle Diamond Data Sheet
Pinnacle DC generators enable quality thin films and maximum process efficiency, with power options from 6 to 20 kw. They produce the best films possible with accurate, repeatable power and leading, low-delivered ARC energy.
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Data Sheets
MDX Series 500 W Data Sheet
The MDX 500 is intended for continuous hard use in a vacuum environment. It is a leading performer in basic magnetron sputtering, dc sputtering with RF bias, and dcbiased RF sputtering.
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Data Sheets
PDX Low-Power Series Data Sheet
The PDX Low-Power Series provides Lightweight, Compact, CE-Marked Power Supplies with High Reliability.
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Digital Assets
Semiconductor Manufacturing: How We Power the Process
Explore how we power the process. Our semiconductor portfolio offers innovative and reliable power products for electrostatic chucks (ESC), inspection, ion implant as well as etch and deposition.
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Digital Assets
Process Power: The New Lithography
Learn more about the technical challenges and advances being realized in modern RF process power systems that make sub 10 nm processing possible.
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Data Sheets
PDX High-Power Series Data Sheet
The PDX high-power series provides compact, CE-Marked, Mid-Frequency Power Supplies with High Reliability and Sweep Frequency Load Mismatch Tuning.
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Data Sheets
Pinnacle Plus Data Sheet
Process-Proven, Pulsed DC for Single-Magnetron Reactive Sputtering of Thin Dielectric Films: Pinnacle Plus+ generators deliver DC power in a pulsing configuration enabling reactive sputtering of extremely uniform, high-quality dielectric films.
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Data Sheets
MDX Series 1kW Data Sheet
MDX Series 1kW provides tight regulation, superior arc control and low stored output energy.
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Digital Assets
Process Power Steps Out From the Shadows
Formerly somewhat hidden from view, process power is growing at a rate even faster than the semiconductor equipment industry itself.
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