Resource Library
White papers, data sheets, videos, etc. — they’re all here. Search by type, solution, and/or product category.
Data Sheets
Sekidenko OR400M Data Sheet
Sekidenko OR400Mz: Single-Channel Temperature Measurement Capability with Selectable/Fixed Emissivity.
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Case Studies
Navigator II Vacuum Capacitor Health Predictive Maintenance with PowerInsight Case Study
Predicting the remaining life of vacuum capacitors, key components of match networks, can help prevent unplanned downtime and costly maintenance of the wafer chamber and the match network.
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Data Sheets
PDX Low-Power Series Data Sheet
The PDX Low-Power Series provides Lightweight, Compact, CE-Marked Power Supplies with High Reliability.
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Digital Assets
Process Power: The New Lithography
Learn more about the technical challenges and advances being realized in modern RF process power systems that make sub 10 nm processing possible.
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Digital Assets
Semiconductor Manufacturing: How We Power the Process
Explore how we power the process. Our semiconductor portfolio offers innovative and reliable power products for electrostatic chucks (ESC), inspection, ion implant as well as etch and deposition.
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Data Sheets
PDX High-Power Series Data Sheet
The PDX high-power series provides compact, CE-Marked, Mid-Frequency Power Supplies with High Reliability and Sweep Frequency Load Mismatch Tuning.
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Data Sheets
OR4000T and OR4000E Data Sheet
The OR4000 multi-channel optical fiber thermometers (OFTs) build on the highly successful OR2000 product family and provide industry leading performance in non-contact temperature measurement for many temperature measurement applications.
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Data Sheets
Sekidenko MXE MOCVD Data Sheet
Sekidenko MXE MOCVD offers high-speed measurement for precise control in MOCVD and advanced semiconductor processes.
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Digital Assets
Process Power Steps Out From the Shadows
Formerly somewhat hidden from view, process power is growing at a rate even faster than the semiconductor equipment industry itself.
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