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Showing 1-5 of 5

Quanta RPS Data Sheet

The Quanta remote plasma source (RPS) enables sophisticated plasma generation and expansion into new thin-film processes not possible with traditional RPS or in-situ plasma generation.

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Downstream Plasma Delivery VHF Source White Paper

A new remote plasma source (RPS) driven by capacitively coupled VHF power is investigated and compared with alternative technologies.

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Enable Highly Stable Plasma Operations RPS White Paper

The Quanta RPS helps meet the challenges of plasma-enhanced chemical vapor deposition issues.

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RPS Measurement Simulation White Paper

This paper describes a new remote source technology using capacitively coupled, VHF energy to produce a flexible and unique remote plasma generator

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3 Tips for Sourcing Chamber Cleaning RPS Systems

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Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.

Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.