Resource Library
White papers, data sheets, videos, etc. — they’re all here. Search by type, solution, and/or product category.
Case Studies
Navigator II Vacuum Capacitor Health Predictive Maintenance with PowerInsight Case Study
Predicting the remaining life of vacuum capacitors, key components of match networks, can help prevent unplanned downtime and costly maintenance of the wafer chamber and the match network.
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Digital Assets
Semiconductor Manufacturing: How We Power the Process
Explore how we power the process. Our semiconductor portfolio offers innovative and reliable power products for electrostatic chucks (ESC), inspection, ion implant as well as etch and deposition.
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Brochures
PowerInsight by Advanced Energy Brochure
Transform power delivery data into unique insights with advanced analytics and machine learning techniques.
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Brochures
RF Calibration Solutions
Advanced Energy offers regular calibration of your RF generators and matches. Trust our experts to keep your precise RF sensors within specification and ensure your tools are operating at their highest potential.
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Data Sheets
Navigator II Digital Matching Networks Brochure
The versatile Navigator® II matching network's advanced technology provides rapid, accurate, and reliable matching across a wide range of power requirements up to 30 kW and frequencies up to 60 MHz.
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Application Notes
Precise Power Control in 3D Device Architectures
Process power plays an essential role enabling complex architectures with atomic-scale features to be formed accurately with minimal defects.
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