Resource Library
White papers, data sheets, videos, etc. — they’re all here. Search by type, solution, and/or product category.
Digital Assets
Semiconductor Manufacturing: How We Power the Process
Explore how we power the process. Our semiconductor portfolio offers innovative and reliable power products for electrostatic chucks (ESC), inspection, ion implant as well as etch and deposition.
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Data Sheets
Paramount Plus Data Sheet
With multi-level pulsing, pulse waveform control, and the broadest feature set available in a pulsed-RF product, the Paramount Plus platform allows you to provide the extreme latitude in plasma control required for next-generation nodes.
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White Papers
Forward and Reflected Power: What Does It Mean?
This paper is intended to help understanding and to dispel myths surrounding RF measurements and practice.
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Brochures
RF Calibration Solutions
Advanced Energy offers regular calibration of your RF generators and matches. Trust our experts to keep your precise RF sensors within specification and ensure your tools are operating at their highest potential.
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Application Notes
Precise Power Control in 3D Device Architectures
Process power plays an essential role enabling complex architectures with atomic-scale features to be formed accurately with minimal defects.
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