.svg){kind=logo}
Apex RF Generator
Active
High-Power Density for Compact Installation
The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.
Features
- High power density in a streamlined design
- On-board chamber mount, on-tool frame mount, rack mount, and shoebox options
- Wideband control loops
- Optional pulse control
- High-speed arc management
Benefits
- Readily integrate process tools with enhanced flexibility
- Stabilize plasma operation
- Improve yield for fast arc management
- Easily customize and configure to your process requirements
Specifications
| Cooling: | water |
|---|---|
| Output Frequency (MHz, kHz): | 13.56 MHz |
| Input Voltage (V): | 208 VAC |
| Power Level (kW): | 1.5 to 10 kW |
| Rack Width: | 1/2 rack and full rack |
| Height (Inches): | 3U |
| Communications Interface: | RS-232, Analog, ethernet, DeviceNet |
| Advanced Features: | Pulsing, CEX |
Featured Resources
Technical Documentation
Product Information Documents
Engineering Resources
Insights & Studies
Services
Premium Services
Combine services into a cost-effective plan including warranties, on-site visits, and more.
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
24/5 Support Available
Get Expert Advice From Our Engineers
We are committed to providing excellent customer service and technical support to our customers. With live chat and phone support, you can reach out to a qualified engineer for help at any time.
Get Support Now