Plasma Power Generators

DC and Pulsed-DC Solvix

The Best in DC and Pulsed-DC Power Delivery Unify

A robust, coordinated suite of power generation specifically designed to enable advanced, high-tech coatings.

  • Ease of operation and configuration with modular DC and pulsed-DC solutions
  • Industry-leading reliability while powering the extreme dynamics of plasma processes
  • Improved film quality with industry-leading power regulation and arc management
  • Overview
  • Technical Specs
  • Service & Support

Overview

Solvix® DC and pulsed-DC power supplies for sputtering applications offer precise accuracy and proven repeatability thanks to more than a decade in the field. With a wide range of power and frequency levels, pulsing, and multiple communications options, Solvix power supplies provide a rugged and cost-effective solution for your unique process.

Benefits

  • Proven reliability, accuracy, and repeatability
  • Reduced substrate damage and process contamination
  • Adaptability to a broad range of process requirements
  • Efficient installation and service
  • Worldwide support network

Features

  • DC and pulsed-DC units
  • Outstanding arc handling
  • Current, power, and voltage regulation modes
  • Air and water cooling
  • Multiple units configurable for varying high power requirements
  • Power

    DC

    3, 10, 15,  and 30 kW 

    Pulsed-DC

    3 to 30 kW

  • Frequency

    Bias Units

    Up to 350 kHz

  • Other

    Cooling

    Air (water cooling available on some higher powered models)

    Communication

    Analog (RS-232/485 and Profibus available) 

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

Call
Within the U.S.:
800.446.9167 (option 2)
Outside the U.S.:
+1.970.221.0108 (option 2)

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You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.