Plasma Power Generators
Industry-Leading, Repeatable Power Delivery for Core Plasma Applications
Paramount RF power generators combine frequency tuning, pulsing, and complete digital control.
- Full digital control for dynamic response to plasma changes
- 13 MHz frequency with power levels from 1.5 to 6kW
- Advanced features for control optimization and synchronization
- Technical Specs
- Service & Support
Advance your process development with a new focus on operating flexibility. Paramount® HF RF generators offer wide power ranges, support multiple integration scenarios, and are equipped with standard serial/analog interfaces and other optional communication interfaces. The Paramount HF enables high plasma density and ion energy required by high aspect ratio devices and speeds process for the next node of semiconductor processing tools..
The Paramount platform’s digital architecture provides precise power management and streamlines new function integration — no lead times or hardware changes needed. High-power output and repeatable performance is achieved by real-time detection of plasma changes. And internal-protection limits facilitate reliable operation.
- Enhance plasma stability and process repeatability
- Precisely control RF power
- Quickly respond to plasma changes
- Easily adapt to meet specific application needs
- Full digital control
- Frequency tuning, pulsing, and pulse synchronization
- Real-time power and impedance measurement
- Arc management
- Phase synchronization (CEX)
1.5, 3, and 6 kW
13 MHz, frequency tuning ±5%
208 and 400/480 VAC ±10%
Air and water
Operating Ambient Temperature Range
+5°C to +40°C, +41°F to +104°F
Dual-level pulsing, arc management, CEX, HALO
RS-232, User Port, Ethernet, DeviceNet, EtherCAT
Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.
Global Support & Services
Advanced Energy offers regular calibration of your RF generators and matches. Trust our experts to keep your precise RF sensors within specification and ensure your tools are operating at their highest potential.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.