Plasma Power Generators
Paramount
Industry-Leading, Repeatable Power Delivery for Core Plasma Applications
Paramount RF power generators combine frequency tuning, pulsing, and complete digital control.
- Full digital control for dynamic response to plasma changes
- Customizable frequency from 400 kHz to 60 MHz and power from 1.5 to 10 kW
- Advanced features for control optimization and synchronization
- Overview
- Technical Specs
- Documents
- Service & Support
Overview
Advance your process development with a new focus on operating flexibility. Paramount® RF generators offer wide frequency and power ranges, support multiple integration scenarios, and are equipped with standard serial or analog interfaces. The Paramount HP 10013 offers higher power enabling high plasma density and ion energy required by high aspect ratio devices and speeds process for the next node of semiconductor processing tools.
The Paramount platform’s digital architecture provides precise power management and streamlines new function integration — no lead times or hardware changes needed. High-power output and repeatable performance is achieved by real-time detection of plasma changes. And internal-protection limits facilitate reliable operation.
Benefits
- Enhance plasma stability and process repeatability
- Precisely control RF power
- Quickly respond to plasma changes
- Easily adapt to meet specific application needs
Features
- Full digital control
- Frequency tuning, pulsing, and pulse synchronization
- Real-time power and impedance measurement
- Arc management
- Phase synchronization (CEX)
Solutions
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Power Level
Paramount MF
2, 3, 5, and 8 kW
Paramount HF
1.5, 3, and 6 kW
Paramount VHF
3, 6, and 7 kW
Paramount HP 10013
10 kW
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Frequencies
Paramount MF
400 kHz / 2 MHz, frequency tuning ±10%
Paramount HF
13 MHz, frequency tuning ±5%
Paramount VHF
27/40/60 MHz, frequency tuning ±5%
Paramount HP 10013
13 MHz, frequency tuning ±5%
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AC Input
208 and 480 VAC ±10%
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Line Frequency
50/60 Hz
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Cooling
Air and water
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Operating Ambient Temperature Range
+5°C to +40°C, +41°F to +104°F
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Advanced Features
Paramount MF
Pulsing, CEX
Paramount HF
Pulsing, arc management, CEX
Paramount HP 10013
Dual-level pulsing, arc management, CEX
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Available Interfaces
RS-232, User Port, Ethernet, DeviceNet, Profibus, EtherCAT
Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.
Global Support & Services
Advanced Energy offers regular calibration of your RF generators and matches. Trust our experts to keep your precise RF sensors within specification and ensure your tools are operating at their highest potential.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Warranties
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.
Product Support
Call
U.S.: +1 800 446 9167
Asia: +86 29 8874 1895
China: 400 8899 130
EMEA: +44 800 032 1546
U.K.: 08000 321 546
Email
Thin Film Support
Thermal Product Support
Other Technical Support