Plasma Power Generators
Paramount
Industry-Leading, Repeatable Power Delivery for Core Plasma Applications
Paramount RF power generators combine frequency tuning, pulsing, and complete digital control.
- Full digital control for dynamic response to plasma changes
- Customizable frequency from 400 kHz to 60 MHz and power from 1.5 to 8 kW
- Advanced features for control optimization and synchronization
- Overview
- Technical Specs
- Documents
- Service & Support
Overview
Advance your process development with a new focus on operating flexibility. Paramount® RF generators offer wide frequency and power ranges, support multiple integration scenarios, and are equipped with standard serial or analog interfaces.
The Paramount platform’s digital architecture provides precise power management and streamlines new function integration — no lead times or hardware changes needed. High-power output and repeatable performance is achieved by real-time detection of plasma changes. And internal-protection limits facilitate reliable operation.
Benefits
- Enhance plasma stability and process repeatability
- Precisely control RF power
- Quickly respond to plasma changes
- Easily adapt to meet specific application needs
Features
- Full digital control
- Frequency tuning, pulsing, and pulse synchronization
- Real-time power and impedance measurement
- Arc management
- Phase synchronization (CEX)
-
Power Level
Paramount MF
2, 3, 5, and 8 kW
Paramount HF
1.5, 3, and 6 kW
-
Frequencies
Paramount MF
400 kHz, frequency tuning ± 10%
Paramount HF
13 MHz, frequency tuning ± 10%
-
AC Input
208 VAC
-
Line Frequency
50/60 Hz
-
Cooling
Air and water
-
Operating Ambient Temperature Range
+5°C to +40°C, +41°F to +104°F
-
Advanced Features
Paramount MF
Pulsing, CEX
Paramount HF
Pulsing, arc management, CEX
-
Available Interfaces
RS-232, User Port, Ethernet, DeviceNet, Profibus, EtherCAT
Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.
Data Sheets
Application Notes
Global Support & Services
Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Warranties
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.
Product Support
Call
Inside the U.S.: 1.800.446.9167 (option 2)
Outside the U.S.
Email
Thin Film Support
Thermal Product Support
Other Technical Support