Plasma Power Generators

Pinnacle Series

The Most Recognized DC Power Supply for <= 20 kW Processes

Advanced Energy's Pinnacle DC generators enable quality thin films and maximum process efficiency.

  • Buy only what you need: Power options from 6 to 20 kW
  • Produce the best films possible with accurate, repeatable power and leading, low-delivered ARC energy
  • Compact air-cooled design expandable in primary/secondary configuration
  • Overview
  • Technical Specs
  • Service & Support

Overview

The field-proven Pinnacle® DC generators deliver remarkable process consistency and control for significantly reduced variation and higher yields. This compact, versatile package offers outstanding arc management with low stored energy, fast arc response, and wide, full-power operational impedance range.

Benefits

  • Lower operating and installed costs
  • Achieve fast arc response
  • Configure arc response
  • Maximize process efficiency
  • Precisely control your process

Features

  • Low stored energy — less than 1 mJ per 1 kW of output
  • No tap changes
  • Output repeatability of ±0.1%
  • Target conditioning cycle (TCC) — minimizes conditioning time for new targets
  • Joule mode — optimized energy delivery
  • Power

    Single Output

    6, 10, 12, or 20 kW

    Dual Output

    6/6 and 10/10 kW, independently controlled

  • Voltage

    Up to 1000 VDC in a single voltage range (no taps)

  • Repeatability

    +/- 0.1% of rated power

  • Accuracy

    +/- 1% setpoint or +/- 0.2% full-rated power (whichever is greater) 

  • Communication Interfaces

    Analog, RS-232/485, Profibus

  • AC Input

    208, 400, 440, and 480 VAC 

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

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Applications Support & Consulting

Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

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Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

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Product Support

Call
Inside the U.S.: 1.800.446.9167 (option 2)
Outside the U.S.


Email
Thin Film Support
Thermal Product Support
Other Technical Support

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Thank You

You may now view any resource on the Advanced Energy site. Click the button below to view your requested resource.