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eVoS ME Bias Solution

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Direct Control of Substrate Voltage and Ion Energy Distribution

Shrinking chip dimensions and high-aspect-ratio structures demand exacting control of ion energy. With the eVoS™ platform, AE introduces a paradigm shift in bias technology. By maximizing the ability to tailor ion energy, eVoS enables precise command of etch and deposition geometries at very small dimensions. Direct control of wafer-surface voltage and ion energy distribution (IED) empowers process engineers to optimize bias performance for specific process results, ensuring sensitive feature formation. In addition, fast digital metrology and novel control algorithms enable the production of narrower IEDs compared to alternative technologies. These capabilities change what’s possible in plasma processing.

Features

  • Real-time bias voltage and ion current feedback
  • Optimized waveform for ion energy control
  • High-speed metrology
  • Multi-level pulsing with fast DC-level response
  • Input and output signals for pulse synchronization
  • Closed-loop control
  • EtherCat® communication
  • High efficiency

Benefits

  • Improved process control
  • Direct control of wafer bias voltage and resulting ion energies
  • Narrow ion energy distributions
  • High-precision ion energy selection
  • Improved etch rate with less input power
  • Streamlined system design and integration

Specifications

Cooling: Water
Output Frequency (MHz, kHz): 0.2 to 1.1 MHz
Input Voltage (V): 400, 480 VAC +/-10%
Rack Width: 19
Height (Inches): 8U
Output Voltage Range (V): 5 kV
Peak Current (A): 6
Pulse Range: 5

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Services

Calibration and Alignment

Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications.  Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards​.

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Repair

Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.

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Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

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Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

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