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Navigator II
Rapid, Accurate, and Reliable Digitally-Tuned Matching
The Navigator® ll is equipped with microprocessor-controlled, stepper-motor drives, and advanced tuning algorithms, enabling optimized RF power. An optional internal Z’Scan® II RF sensor provides real-time analysis of process power and impedance, allowing you to quickly identify and significantly reduce process variability. Optional Virtual Front Panel software is available for monitoring and control through a user’s computer.
Eigenschaften
- Digital architecture with enhanced tuning algorithms
- Pulsed-RF power delivery
- Sweep-frequency operation
- Intermodulation distortion (IMD) immunity for multi-frequency applications
- Real-time process power and impedance measurement
Vorteile
- Speeds tuning/matching response time
- Tightens process control
- Helps increase tool throughput and product yield
Spezifikationen
| Kühlung: | Hybrid (air and water) |
|---|---|
| Ausgangsfrequenz (MHz, kHz): | 400 kHz to 60 MHz |
| Eingangsspannung (V): | 110 VAC |
| Leistungsstufe (kW): | 1 to 60 kW |
| Rack Breite: | N/A, chamber mounted |
| Kommunikationsschnittstelle: | EtherCAT, Ethernet, DeviceNet, RS-232 |
| Erweiterte Funktionen: | Pulsing, CEX |
| Anwendungen verarbeiten: | Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE |
Featured Resources
Navigator II Digital Matching Networks Brochure
Navigator II matching network provides rapid, accurate, and reliable matching across a wide range of power requirements. Download Navigator II Brochure for details regarding product specifications, electrical specifications, mechanical specifications and more
Navigator II Vacuum Capacitor Health Predictive Maintenance with PowerInsight
RF Calibration Solutions
Technische Dokumentation
Dienstleistungen
Premium Services
Combine services into a cost-effective plan including warranties, on-site visits, and more.
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
