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MAXstream Remote Plasma Source

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Reliable, High-Performance Remote Plasma Source for Chamber Clean Applications

The MAXstream™ RPS is available in multiple SLPM NF3 flow rates to optimize price and performance. It ensures long chamber life and low particle generation, and a unique dual ignition core design delivers best-in-class plasma ignition reliability. 

Eigenschaften

  • MAXstream 300 (≤ 3 L) for low flow applications and MAXstream 1200 (≤ 12 L) for higher flow applications
  • Highly reliable RPS maximizes tool uptime
  • Enhanced cooling of plasma source walls to reduce damage from thermal expansion and chemical erosion
  • Active monitoring and control of plasma power for advanced power control

Vorteile

  • Optimize cost via multiple flow options
  • Save valuable tool space with a smaller footprint than Xstream RPS
  • Extremely reliable ignition with unique AE dual ignition cores
  • Increase chamber life with proprietary AE chamber design
  • Reduce cleaning time with up to 12 SLPM flow capabilities

Spezifikationen

Kühlung: Water
Ausgangsfrequenz (MHz, kHz): 400 kHz
Eingangsspannung (V): 208 VAC
Leistungsstufe (kW): 6 to 12 kW
Rack Breite: N/A, chamber mounted
Kommunikationsschnittstelle: RS-232, Analog, Ethernet, EtherCAT
Anwendungen verarbeiten: Chamber Clean, Reactive Etch, Reactive Deposition
Chemische Verträglichkeit: Ar, O2, H2, N2, F2, H2O, NF3, CxFy
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Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.

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Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications.  Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards​.

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