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Litmas
Vorteile
- The Litmas RPS efficiently delivers reactive gas species to enable the effective abatement of PFC gases with multiple options for chamber materials
- Wide operating window using AE's patented LitmasMatch™ solid-state power-delivery topology for maximum process development flexibility
- High destructive rate efficiency (DRE) and high plasma density enabling compatibility with a broad range of process chemistries
- Low utility useage and increased life span reduce the total cost of ownership
Spezifikationen
| Kühlung: | Water |
|---|---|
| Ausgangsfrequenz (MHz, kHz): | 2 MHz |
| Eingangsspannung (V): | 208 VAC |
| Leistungsstufe (kW): | 1.5 to 4 kW |
| Rack Breite: | N/A, chamber mounted |
| Kommunikationsschnittstelle: | RS-232, Analog, Ethernet |
| Anwendungen verarbeiten: | Abatement |
| Chemische Verträglichkeit: | Ar, O2, H2, N2, H2O, F2, NF3, SF6, and CxFy |
Dienstleistungen
Calibration and Alignment
Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications. Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Field services and On-Site Training
Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
Refurbishments
Extend product life and reduce mean time between failure by replacing time-dependent components during reactive or preventative maintenance. Get the performance you would expect at the time of original manufacture for a fraction of the cost of a new unit
Repair
Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Service Agreements
Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Total Service Package
We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
