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Ascent DMS Pulsed and DC Power System

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Advanced Dual-Magnetron Sputtering Accessories

The Ascent® DMS series offers unprecedented power-delivery ease and control for dual-magnetron sputtering, enabling precise tuning of film characteristics. With selectable frequency, regulation mode, and duty cycle, as well as low stored energy and simplified, modular system configuration, the Ascent DMS accessory distinguishes itself as truly next-generation technology. Cost-effective, scalable, and versatile, it minimizes complexity, increases quality, and boosts throughput to enable advanced process innovation.  The Ascent DMS MF-120 package provides cost-effective, mid-frequency power for standard cathodes, while delivering bipolar pulsing technology benefits. 

Eigenschaften

  • Modular and scalable (40, 60, and 120 kW models configurable up to 180 kW)
  • Selectable frequency (500 Hz to 50 kHz)
  • Adjustable duty cycle — independent power ratio regulation for each magnetron
  • Advanced process management through a tiered approach to arc mitigation
  • CEX (phase synchronization)

Vorteile

  • Increased film value: Repeatable, customizable deposited films
  • Lower cost of ownership and increased productivity
  • Higher power levels with improved stability and reduced arc damage
  • Easy scalability, integration, and support
  • Modular design allows you to pay for only what you need while enabling future capability expansion

Spezifikationen

Kühlung: Hybrid (air and water)
Ausgangsfrequenz (MHz, kHz): 0.5 to 50 kHz
Eingangsspannung (V): 100 to 240 VAC
Leistungsstufe (kW): 40 to 120 kW
Rack Breite: Full rack
Höhe (Zoll): 6U, 10U
Ausgangsspannungsbereich (V): 400-1000 V
Kommunikationsschnittstelle: Ethernet, EtherCAT, DeviceNet, Profibus, RS-232/485, EtherNet/IP, and analog communications
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