Ascent DMS Pulsed and DC Power System
Advanced Dual-Magnetron Sputtering Accessories
Eigenschaften
- Modular and scalable (40, 60, and 120 kW models configurable up to 180 kW)
- Selectable frequency (500 Hz to 50 kHz)
- Adjustable duty cycle — independent power ratio regulation for each magnetron
- Advanced process management through a tiered approach to arc mitigation
- CEX (phase synchronization)
Vorteile
- Increased film value: Repeatable, customizable deposited films
- Lower cost of ownership and increased productivity
- Higher power levels with improved stability and reduced arc damage
- Easy scalability, integration, and support
- Modular design allows you to pay for only what you need while enabling future capability expansion
Spezifikationen
Kühlung: | Hybrid (air and water) |
---|---|
Ausgangsfrequenz (MHz, kHz): | 0.5 to 50 kHz |
Eingangsspannung (V): | 100 to 240 VAC |
Leistungsstufe (kW): | 40 to 120 kW |
Rack Breite: | Full rack |
Höhe (Zoll): | 6U, 10U |
Ausgangsspannungsbereich (V): | 400-1000 V |
Kommunikationsschnittstelle: | Ethernet, EtherCAT, DeviceNet, Profibus, RS-232/485, EtherNet/IP, and analog communications |
Featured Resources

Ascent® DMS Brochure
The Ascent® DMS series offers unprecedented power delivery ease and control for dual-magnetron sputtering, enabling precise tuning of film characteristics.

Optimizing Static Deposition Processes White Paper

Optimizing Glass Process Stability, Throughput with the PowerInsight by Advanced Energy™ IoT Solution
Technische Dokumentation
Technische Videos

Exclusive Dynamic Reverse Pulsing Technology for Plasma Power
Verwandte Anwendungen
Alle Anwendungen erkundenDienstleistungen
Premium Services
Combine services into a cost-effective plan including warranties, on-site visits, and more.
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
