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Sekidenko OR400M Series
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Single-Channel Temperature Measurement Capability with Selectable/Fixed Emissivity
Advanced Energy’s OR400M Optical Pyrometer extends the flexibility of the Sekidenko product family into the mid-IR wavelength range, from 3.3 to 5.2 µm. The OR400M offers a single-channel temperature measurement capability for thin-film solar, glass, and advanced semiconductor processes. The OR400M supports RS-232 and analog data interfaces. Because of its compact design, the OR400M can easily meet small-footprint requirements of many process applications.
Eigenschaften
- Non-contact temperature measurement employing lensed optical sensors
- Automatic ambient thermal correction
- Industry-leading temperature and read rates
- Highly flexible, module-based platform architecture
- Full I/O and external trigger/synchronization suite
Vorteile
- Improves temperature measurement accuracy for critical processes
- Enhances repeatability and minimizes variation
- Increases productivity, yield, and throughput
- Increases stability and reliability across multiple chambers and substrate materials
Spezifikationen
| Betriebstemperaturbereich (°C): | 50 to 1300 |
|---|---|
| Spektralbereich (µm): | 3.3 to 5,2 |
| Schnittstelle / Ausgang (mA): | RS-232 at up to 115 kB |
| Genauigkeit: | ±3 °C |
| Gewicht (kg): | 0.39 |
| Wellenlängen-Wiederholbarkeit (pm): | ±0.1 |
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