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Sekidenko 401M Series
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High-speed, mid-wave, non-contact optical pyrometer with embedded EtherCAT capability.
Advanced Energy’s 401M Optical Pyrometer extends the flexibility of the Sekidenko product family into the mid-wavelength pyrometer range, from 1.7 µm to 5.2 µm. The 401M offers a single-channel non contact temperature measurement capability for thin-film solar, glass pyrometer applications, and advanced semiconductor temperature measurement processes. The 401M supports EtherCAT, USB, Serial, and analog data interfaces. Because of its compact design, the 401M can easily meet small-footprint requirements of many demanding industrial high temperature pyrometer applications.
Eigenschaften
• Built-in EtherCAT capability.
• High-speed (up to 1kHz).
• Non-contact temperature measurement with lens-based optics
• Automatic ambient thermal correction
• Industry-leading temperature range and read rates
• Highly flexible, module-based platform architecture
• Full I/O and external trigger/synchronization capability
• High-speed (up to 1kHz).
• Non-contact temperature measurement with lens-based optics
• Automatic ambient thermal correction
• Industry-leading temperature range and read rates
• Highly flexible, module-based platform architecture
• Full I/O and external trigger/synchronization capability
Vorteile
• Improves temperature measurement accuracy for critical processes
• Enhances process repeatability and minimizes variation
• Increases productivity, yield, and throughput
• Increases stability and reliability across multiple chambers and substrate materials
• Enhances process repeatability and minimizes variation
• Increases productivity, yield, and throughput
• Increases stability and reliability across multiple chambers and substrate materials
Spezifikationen
| Betriebstemperaturbereich (°C): | 15 to 40°C |
|---|---|
| Spektralbereich (µm): | 1.7um – 6um (2.7, 3.3, & 5.2um typical) |
| FOV (minimale Punktgröße) (mmm): | ≥1mm |
| Ausrichten / Sichten: | Sighting: None. Alignment: Mechanical alignment included in front housing |
| Schnittstelle / Ausgang (mA): | Analog Out (4-20mA, 0-10V), ECAT, Serial / C, F, K |
| Genauigkeit: | ±3 °C (2.7 & 3.3um) ±5 °C (5.2um) |
| Messbereich: | 50 to 1300C |
| Messgenauigkeit (%): | ±3 °C (2.7 & 3.3um) ±5 °C (5.2um) |
Technische Dokumentation
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