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Sekidenko 401M Series

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High-speed, mid-wave, non-contact optical pyrometer with embedded EtherCAT capability.

Advanced Energy’s 401M Optical Pyrometer extends the flexibility of the Sekidenko product family into the mid-IR wavelength range, from 1.7 µm to 5.2 µm. The 401M offers a single-channel temperature measurement capability for thin-film solar, glass, and advanced semiconductor processes. The 401M supports EtherCAT, USB, Serial and analog data interfaces. Because of its compact design, the 401M can easily meet small-footprint requirements of many demanding process applications.

Eigenschaften

•    Built-in EtherCAT capability.
•    High-speed (up to 1kHz).
•    Non-contact temperature measurement with lens-based optics
•    Automatic ambient thermal correction
•    Industry-leading temperature range and read rates
•    Highly flexible, module-based platform architecture
•    Full I/O and external trigger/synchronization capability

Vorteile

•    Improves temperature measurement accuracy for critical processes
•    Enhances process repeatability and minimizes variation
•    Increases productivity, yield, and throughput
•    Increases stability and reliability across multiple chambers and substrate materials
 

Spezifikationen

Betriebstemperaturbereich (°C): 15 to 40°C
Spektralbereich (µm): 1.7um – 6um (2.7, 3.3, & 5.2um typical)
FOV (minimale Punktgröße) (mmm): ≥1mm
Ausrichten / Sichten: Sighting: None. Alignment: Mechanical alignment included in front housing
Schnittstelle / Ausgang (mA): Analog Out (4-20mA, 0-10V), ECAT, Serial / C, F, K
Genauigkeit: ±3 °C (2.7 & 3.3um) ±5 °C (5.2um)
Messbereich: 50 to 1300C
Messgenauigkeit (%): ±3 °C (2.7 & 3.3um) ±5 °C (5.2um)

Technische Dokumentation

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