Plasma Power
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Model-Based Frequency Tuning Revolutionizes RF Power Delivery
Juli 29, 2025
In semiconductor fabrication, RF power plays a crucial role in plasma generation used for etching and deposition to build the complex, layered structures of modern integrated circuits (ICs). Delivering the correct power into each process step must be tightly controlled and repeatable, and critical device structure tolerances are shrinking with each process node generation.
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