Zum Inhalt springen

Advanced Energy’s New Power Meter Improves Accuracy and Performance in Precision RF Power Applications

Veröffentlicht Dezember 08, 2021

SEMICON WEST 2021

Advanced Energy’s New Power Meter Improves Accuracy and Performance in Precision RF Power Applications

Integrating power sensor and meter into a single easy-to-use instrument, the new RF power meter simplifies monitoring and enables precise control

DENVER, Colo., December 8, 2021 — Advanced Energy (Nasdaq: AEIS) – a global leader in highly engineered, precision power conversion, measurement, and control solutions – today announced the GEMINI™ 5540A RF (Radio Frequency) power meter. The new power meter delivers highly accurate in-line RF power measurement in a flexible and convenient integrated unit for applications requiring precision RF power control in semiconductor, communication, industrial and medical markets. As the leader in RF power solutions in the semiconductor industry, Advanced Energy continues to bring new capabilities for improving plasma power controls and the performance of advanced etch and deposition processes.

Combining sensor and meter capability into a single, easy-to-use instrument, the GEMINI 5540A measures at frequencies from 0.2 to 200 MHz and powers from 3 to 5,000 W with 2-sigma accuracy of ±0.5% + 0.5 W. This integrated instrument enables users to replace multiple instruments with a single meter for applications that require precise measurement and control of RF power.

“In demanding semiconductor processes such as high aspect ratio (HAR) plasma etch, precise control and chamber-to-chamber matching of the RF system directly impact process performance,” said Gerry Blumenstock, vice president, critical sensing and control products at Advanced Energy. “With the new GEMINI 5540A, OEMs can accurately calibrate the system and monitor RF power in real-time, improving the fidelity and consistency of leading-edge plasma-based processes.”

The GEMINI 5540A incorporates a large, easy-to-read OLED digital display that simultaneously shows forward and reverse power, voltage standing wave ratio (VSWR), and frequency. It automatically senses frequency with no reconfiguration required for forward and reverse power measurements. The meter reduces calibration to every 12 months, compared to six months for conventional instruments. It operates with a 5 V, 500 mA input supplied via a standard USB 2.0 port using either an external battery or AC power outlet and an off-the-shelf USB adapter.

In addition to taking measurements directly, the meter can also be connected to a PC for collection, storage, and audit of data using Advanced Energy’s GEMINI Tool’s data visualization software.

For detailed product information and technical specifications, visit GEMINI 5540A RF Power Meter.

The GEMINI 5540A is showcased at AE’s booth 834 at SEMICON West 2021 alongside other solutions for semiconductor manufacturing, including AE’s fast, accurate and reliable match networks. SEMICON West 2021 takes place December 7-9 at the Moscone Center in San Francisco, CA.

Teilen Sie

Über Advanced Energy

Advanced Energy Industries, Inc. (Nasdaq: AEIS) ist ein weltweit führendes Unternehmen in der Entwicklung und Herstellung von hochentwickelten, präzisen Energieumwandlungs-, Mess- und Steuerungslösungen für unternehmenskritische Anwendungen und Prozesse. Die Energielösungen von Advanced Energy ermöglichen den Kunden Innovationen in komplexen Anwendungen für ein breites Spektrum von Branchen, darunter Halbleiterausrüstung, industrielle Produktion, Medizin und Biowissenschaften, Datencenter, Netzwerke und Telekommunikation. Mit technischem Know-how und reaktionsschnellem Service und Support für Kunden auf der ganzen Welt baut das Unternehmen Kooperationspartnerschaften auf, um dem technologischen Fortschritt gerecht zu werden, das Wachstum seiner Kunden voranzutreiben und die Zukunft der Energieversorgung innovativ zu gestalten. Advanced Energy widmet sich seit vier Jahrzehnten der Perfektionierung der Energieversorgung. Der Hauptsitz des Unternehmens befindet sich in Denver, Colorado, USA.

Weitere Informationen finden Sie unter www.advancedenergy.com.

Advanced Energy | Precision. Kraft. Leistung. Vertrauen
Tragen Sie sich in unsere Mailingliste ein
Abonnieren
Neueste Beiträge
View on X
Code added on 30 Aug 24

Looking for the right solution? Let's chat!

Chat Now Just Browsing