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Navigator II
Rapid, Accurate, and Reliable Digitally-Tuned Matching
The Navigator® ll is equipped with microprocessor-controlled, stepper-motor drives, and advanced tuning algorithms, enabling optimized RF power. An optional internal Z’Scan® II RF sensor provides real-time analysis of process power and impedance, allowing you to quickly identify and significantly reduce process variability. Optional Virtual Front Panel software is available for monitoring and control through a user’s computer.
특징
- Digital architecture with enhanced tuning algorithms
- Pulsed-RF power delivery
- Sweep-frequency operation
- Intermodulation distortion (IMD) immunity for multi-frequency applications
- Real-time process power and impedance measurement
혜택
- Speeds tuning/matching response time
- Tightens process control
- Helps increase tool throughput and product yield
사양
| 냉각: | Hybrid (air and water) |
|---|---|
| 출력 주파수(MHz, kHz): | 400 kHz to 60 MHz |
| 입력 전압(V): | 110 VAC |
| 전력 수준(kW): | 1 to 60 kW |
| 랙 너비: | N/A, chamber mounted |
| 통신 인터페이스: | EtherCAT, Ethernet, DeviceNet, RS-232 |
| 고급 기능: | Pulsing, CEX |
| 애플리케이션 처리: | Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE |
Featured Resources
Navigator II Digital Matching Networks Brochure
Navigator II matching network provides rapid, accurate, and reliable matching across a wide range of power requirements. Download Navigator II Brochure for details regarding product specifications, electrical specifications, mechanical specifications and more
Navigator II Vacuum Capacitor Health Predictive Maintenance with PowerInsight
RF Calibration Solutions
기술 문서
서비스
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