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Xstream Remote Plasma Source

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High-Quality, Chamber-Clean Remote Plasma Source with Unrivaled Performance

The highly efficient Xstream® RPS dissociates large volumes of NF3 and quickly cleans chambers, improving your overall tool performance. Its plasma chamber showcases high-purity aluminum alloy and patented cooling capabilities. Built to last for years without repair or expensive chamber coatings, the Xstream RPS is the smart choice for dependability and efficient performance.

특징

  • Highly reliable RPS maximizes tool uptime
  • Effective reactive species transportation to process chamber for improved performance
  • Transformer coupled plasma (TCP) source with integrated Active Match Network (AMN)
  • 225 kHz to 660 kHz operating frequency
  • 8 kW/10 kW power models

혜택

  • Eliminate expensive chamber coatings with custom aluminum alloy and Type III hard anodization 
  • Improve chamber performance and durability via a cooling system that minimizes thermal stress
  • Increase efficiency and improve power delivery to the plasma with an Active Match Network
  • Precisely control power and processes thanks to real-time plasma measurements
  • Achieve reliable and reproducible plasma ignition via a patented ignition system 

사양

냉각: Hybrid (air and water)
출력 주파수(MHz, kHz): 400 kHz
입력 전압(V): 208 VAC
전력 수준(kW): 6 kW
랙 너비: N/A, chamber mounted
통신 인터페이스: RS-232, Analog, Ethernet, EtherCAT
애플리케이션 처리: Chamber Clean, Reactive Etch, Reactive Deposition
화학적 호환성: Ar, O2, H2, N2, F2, H2O, NF3, CxFy
모든 사양 사양 축소

기술 문서

서비스

Repair

Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.

Premium Services

Combine services into a cost-effective plan including warranties, on-site visits, and more.

Refurbishments

Choose refurbishment over repair to minimize down time, extend life, and reduce the total cost of ownership of your mature power products.

Calibration and Alignment

Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications.  Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards​.

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