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剥离
在半导体制造中，剥离步骤的作用是去除残留的光刻胶。在等离子蚀刻过程中，精确控制功率对于确保完美剥离晶圆表面、杜绝任何潜在缺陷至关重要。
通过精确控制功率实现完美晶圆剥离
去除残留的光刻胶，对于确保高质量产品至关重要。Advanced Energy 的等离子电源输送系统、交流/直流和直流/直流前端电源以及机架系统产品组合能够以可控、高效的方式提供去除光刻胶所需的精确功率。我们的产品设计始终致力于优化效率和功率密度，在降低总拥有成本的同时确保可靠性和长时间正常运行。AE 的各种行业标准板载电源模块得到原始设备制造商和系统集成商的广泛应用，可提供半导体制造商所需的灵活性和可扩展性，满足剥离工艺的要求。
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What was new this year at SEMICON® West? This July, semiconductor professionals gathered virtually and in person at the Moscone Convention Center to make connections, exchange ideas, and discover what’s on the horizon for the industry.
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