홈 Products Sense and Measurement Temperature Sensing Fiber Optic Sensors Luxtron® M-1100 Fiber Optic Temperature Converter

Luxtron® M-1100 Fiber Optic Temperature Converter

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Fiber optic temperature sensing for semiconductor in etch and deposition applications

영업팀에 문의 데이터 시트

The Advanced Energy's Luxtron^® M-1100 is the latest FluorOptic^® thermometry (FOT) converter platform, featuring an advanced light source and improved ultralow noise electronics. Two new proprietary phosphor formulations VioLux^TMand RubiLux^TMhave been developed to deliver 0.5°C accuracy, repeatability, and stability over an extended range -200 to 450°C.

특징 사양 기술 문서 소프트웨어 Videos Support

특징

Wide supported temperature range
Low noise level with fast response rate
5 channels in a single converter
Flexible communication outputs
EtherCAT Interface (optional)
Analog output

혜택

Non-contact measurement to minimize the thermal offset
Easy to install into OEM equipment
Achieve high accuracy and a extreme temperature control for different etching and wafer fab processes
Receive support from experienced applications engineers to customize probes for OEMs

사양

작동 온도 범위(°C):	5 to 60
채널 수:	Up to 5
정확도:	± 0.5 °C
소음(°C):	≤ 0.05 °C
측정 범위:	-200 to 450
통신 인터페이스:	ECAT, 4 to 20 mA or 0 to 10 V
판독 속도(Hz):	1 to 50
소프트웨어:	TrueTemp+

기술 문서

Product Information Documents

Engineering Resources New

Insights & Studies New

소프트웨어

TrueTemp+

다운로드

기술 동영상

Putting FluorOptic® to Work

12월 15, 2025

This video gives an overview of AE Fluorotic Probes, highlighting their reliable and accurate temperature sensing in tough environments. It covers the Luxtron M-1100 & M-1200 Series System and various probes, including medical-grade, rugged, and high-temperature options. Instructions are provided for measuring temperatures on surfaces and in liquids. The guide is aimed at professionals needing consistent temperature monitoring in industrial and medical settings.

비교

Model	Luxtron M-1100	Luxtron M900	WaveCapture FBG Analyzer Series
채널 수	Up to 5	4 to 64	1
정확도	± 0.5 °C	±0.5 to ± 0.1 °C	+/-5 pm
소음(°C)	≤ 0.05 °C	< 0.1 °C	1 pm
통신 인터페이스	ECAT, 4 to 20 mA or 0 to 10 V	RS232, RS485	USB 2.0, RS232, Ethernet IEEE 802.3