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Navio Match Network
Economical, Digital, Configurable Matching Network Solution
- Plug-and-play installation with Advanced Energy’s RF power supplies for thin film applications
- Efficient and stable power delivery
- Compact and air-cooled
특징
- Quick, accurate, and repeatable impedance matching
- Optimized, off-the-shelf functionality for many applications
- Generous menu of configuration options for more sophisticated processes
- Wide power
- Compact air-cooled unit
혜택
- Improve throughput, increase yield, and reduce production costs
- Choose a standard model or configure a unit that meets your system requirements
- Install and operate with ease
- Obtain excellent repeatability for high process yield
사양
| 냉각: | Air |
|---|---|
| 출력 주파수(MHz, kHz): | 13 MHz |
| 입력 전압(V): | 24 VDC or 110 VAC |
| 전력 수준(kW): | 1 to 5 kW |
| 랙 너비: | N/A, chamber mounted |
| 통신 인터페이스: | Analog, RS 232 |
| 애플리케이션 처리: | Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE |
기술 문서
서비스
Premium Services
Combine services into a cost-effective plan including warranties, on-site visits, and more.
Repair
Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.
Calibration and Alignment
Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications. Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards.
Refurbishments
Choose refurbishment over repair to minimize down time, extend life, and reduce the total cost of ownership of your mature power products.
Upgrades & Enhancements
Take advantage of the latest engineering innovations to optimize long-term product performance. Add custom-engineered solutions to utilize new feature sets and functionality
Trade In
Leverage your original investment and reduce the cost of a new unit by trading in your old unit.
Used Equipment
We have a catalog of high-quality current, and legacy used products that have been fully tested and maintained. These products are covered under warranty with options available for extended warranty as well.
