Ascent DMS Pulsed and DC Power System
Advanced Dual-Magnetron Sputtering Accessories
특징
- Modular and scalable (40, 60, and 120 kW models configurable up to 180 kW)
- Selectable frequency (500 Hz to 50 kHz)
- Adjustable duty cycle — independent power ratio regulation for each magnetron
- Advanced process management through a tiered approach to arc mitigation
- CEX (phase synchronization)
혜택
- Increased film value: Repeatable, customizable deposited films
- Lower cost of ownership and increased productivity
- Higher power levels with improved stability and reduced arc damage
- Easy scalability, integration, and support
- Modular design allows you to pay for only what you need while enabling future capability expansion
사양
냉각: | Hybrid (air and water) |
---|---|
출력 주파수(MHz, kHz): | 0.5 to 50 kHz |
입력 전압(V): | 100 to 240 VAC |
전력 수준(kW): | 40 to 120 kW |
랙 너비: | Full rack |
높이(인치): | 6U, 10U |
출력 전압 범위(V): | 400-1000 V |
통신 인터페이스: | Ethernet, EtherCAT, DeviceNet, Profibus, RS-232/485, EtherNet/IP, and analog communications |
Featured Resources

Ascent® DMS Brochure
The Ascent® DMS series offers unprecedented power delivery ease and control for dual-magnetron sputtering, enabling precise tuning of film characteristics.

Optimizing Static Deposition Processes White Paper

Optimizing Glass Process Stability, Throughput with the PowerInsight by Advanced Energy™ IoT Solution
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