홈 Products High Voltage Power Supplies E-Chuck Bipolar Trek 645 Series

Trek 645 Series

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Software-Driven Electrostatic Chuck Supply, Output Voltage Range 0 to ±2 kV

The Trek^® 645 software-driven electrostatic chuck supply with a documented history increases efficiency and throughput equal to three times that of other supplies. The versatile trusted performance of the Trek 645 allows for use in multiple unique tools and processes that eliminates the need to specify a new supply for each unique tool or process in a facility.

특징

Lockable front panel control interface
NIST-traceable calibration certificate provided with each unit
Supports both Coulombic and Johnsen-Rahbek ESC technologies
Upload and store electrostatic chuck profiles to the unit and stored internally via a user-friendly software interface
Wafer detection includes no-wafer, wafer-present or wafer-clamped status

혜택

Reduce backside gas errors, increases throughput, and eliminate sticky/popping wafer issues
Control parameters such as over-current, wafer-present, and wafer-clamped thresholds, clamp voltage, offset voltage and internal or external amplitude/offset control
Adjust in-process amplitude/offset and output-control versatility
Control output using the back panel I/O, serial computer command, or front panel controls
Configure for custom clamp and declamp sequences and wave shapes

사양

출력 전력(W):	13
최대 출력 전류(A):	±0.0065
슬루율(V/ms):	-
출력 전압 범위(V):	0 to ±2000

기술 문서

제목	유형
Electrostatic Semiconductor Wafer Clamping/Chucking System (ESC) Application Note (607 KB)	애플리케이션 노트
Trek 645 Data Sheet (111 KB)	데이터 시트