Sekidenko 401M Series

Active

High-speed, mid-wave, non-contact optical pyrometer with embedded EtherCAT capability.

Advanced Energy’s 401M Optical Pyrometer extends the flexibility of the Sekidenko product family into the mid-IR wavelength range, from 1.7 µm to 5.2 µm. The 401M offers a single-channel temperature measurement capability for thin-film solar, glass, and advanced semiconductor processes. The 401M supports EtherCAT, USB, Serial and analog data interfaces. Because of its compact design, the 401M can easily meet small-footprint requirements of many demanding process applications.

특징

•   Built-in EtherCAT capability.
•   High-speed (up to 1kHz).
•   Non-contact temperature measurement with lens-based optics
•   Automatic ambient thermal correction
•   Industry-leading temperature range and read rates
•   Highly flexible, module-based platform architecture
•   Full I/O and external trigger/synchronization capability

혜택

•   Improves temperature measurement accuracy for critical processes
•   Enhances process repeatability and minimizes variation
•   Increases productivity, yield, and throughput
•   Increases stability and reliability across multiple chambers and substrate materials

사양

작동 온도 범위(°C):	15 to 40°C
스펙트럼 범위(µm):	1.7um – 6um (2.7, 3.3, & 5.2um typical)
FOV(최소 스팟 크기)(mm):	≥1mm
정렬 / 조준:	Sighting: None. Alignment: Mechanical alignment included in front housing
인터페이스/출력(mA):	Analog Out (4-20mA, 0-10V), ECAT, Serial / C, F, K
정확도:	±3 °C (2.7 & 3.3um) ±5 °C (5.2um)
측정 범위:	50 to 1300C
측정 정확도(%):	±3 °C (2.7 & 3.3um) ±5 °C (5.2um)