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Omni™ RF Diagnostic Cart
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Calibrate with Accuracy, Optimize with Confidence.
The Omni™ RF diagnostic cart is a comprehensive solution to optimize power delivery for critical semiconductor processes. It provides accurate RF calibration and diagnostics by combining AE’s 5540A RF Power Meter with PowerInsight by Advanced Energy™ IoT enabled data ecosystem into a single, user-friendly cart.
특징
- One RF power meter (combination of sensor and meter design) can be configured up to six frequencies
- Power accuracy of ±0.5% + 0.5 W across power range
- Frequency range band of 0.2 to 200 MHz, 5 kW
- Automatic or manual modes of measurement
- Metadata tagging and data storage capability for long term monitoring
- Local and remote monitoring access via touchscreen, HDMI, USB-C, or LAN
- Dashboards and alerts for visualization and predictive analytics
- Data export to CSV file
- Mobile cart with four locking swivel casters
혜택
- Optimize RF power delivery for critical semiconductor processes
- Configuration of up to 6 frequencies within a single sensor lowers investment cost (covers 400 kHz, 2 MHz, 13.56 MHz, 27 MHz, 40 MHz, 60 MHz, and more)
- Yearly calibration of the sensor – ease of maintenance and lower operating costs
- Agnostic – measures RF power from non-AE power products
- Accessibility to sensor for ease of calibration and servicing
- Unique data collection features to track trends and reduce equipment downtime and operational costs
- Mobile design for easy navigation within fabs
- Customizations provided upon request
사양
| Cart Dimensions (L x W x H): |
48in. (51in. to handle) x 18.2in. x 35.6in. (41.1in. display raised) |
|---|---|
| Cart Input Voltage: |
100/230 VAC, +/-10%, 50/60 Hz |
| Cart Communications: |
USB-A, RJ-45, X5 RJ-45, USB-C, HDMI |
| RF power sensor frequency range: |
0.2 to 200 MHz |
| RF power sensor accuracy: |
+/- (0.5% of Rdg + 0.5 W) at the calibrated frequencies and power ranges |
| 50-ohm Load Power: |
10 kW |
| 50-ohm Load Cooling: |
Oil and air cooling with fans |
| PowerInsight HMI: |
10.1in. adjustable touchscreen tablet |
Featured Resources
기술 문서
Product Information Documents
Updated
기술 동영상
Omni™ RF Diagnostic Cart
4월 30, 2025
The Omni™ RF diagnostic cart is a comprehensive solution to optimize power delivery for critical semiconductor processes. In this video, we highlight the performance capabilities and measurement modes for verifying delivered power from RF generators. The Omni RF diagnostic cart provides accurate RF calibration and diagnostics by combining Advanced Energy's 5540A RF Power Meter with PowerInsight by Advanced Energy® IoT enabled data ecosystem into a single, user-friendly cart. With this calibration cart, calibrate with accuracy and optimize with confidence for your RF generator calibration needs.
View the full product details here: www.advancedenergy.com/en-us/products/plasma-power-products/integrated-systems/omni-rf-diagnostic-cart/.
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서비스
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
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