Advanced Energy's Trek e-chuck (electrostatic chuck) supplies offer a combination of superior control parameters such as over-current, wafer-present, and wafer-clamped thresholds, along with adjustable clamp voltage, offset voltage, and internal or external DC bias offset control. These components enhance throughput and yield with custom clamp and de-clamp sequences and wave shapes, optimizing the semiconductor manufacturing process. Besides improving productivity, they tackle persistent manufacturing issues by eliminating sticky wafer and wafer popping challenges, reducing wafer damage, enhancing yield, and ensuring a more reliable semiconductor manufacturing process.
|Electrostatic Semiconductor Wafer Clamping/Chucking System (ESC) Application Note (607 KB)||アプリケーションノート|
|Trek 645 Data Sheet (111 KB)||データシート|
|Trek 646 Data Sheet (126 KB)||データシート|