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PEII Low Frequency Power Supply
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The PEII power supply provides 40 kHz pulse width modulation (PWM). It features advanced arc control and internal load matching with outputs of up to 60 kW when units are combined—requiring no external hardware such as transformers or tuners. The power supply also offers two distinct arc-handling circuits, and the floating output can be grounded on either side.
特点
• High power density
• Wide tap range
• Regulation on power, voltage, or current
• Enhanced arc control
• Automatic process safeguard
• Flexible modularity
• Efficient, compact design
• Wide tap range
• Regulation on power, voltage, or current
• Enhanced arc control
• Automatic process safeguard
• Flexible modularity
• Efficient, compact design
益处
• Dual-cathode and other reactive sputtering applications used to create energy-efficient optical and glass coatings
• Dual-cathode PECVD that produce film and plastic coatings for decorative films, food packaging, capacitor films, and other films
• PECVD, DLC, metal oxides, and carbon coatings that provide tool and tribological coatings
• Dual-cathode PECVD that produce film and plastic coatings for decorative films, food packaging, capacitor films, and other films
• PECVD, DLC, metal oxides, and carbon coatings that provide tool and tribological coatings
规格
| 冷却: | Water |
|---|---|
| 输出频率（兆赫、千赫）: | 40 kHz |
| 输入电压 (V): | 208, 400 VAC |
| 功率等级（千瓦）: | 5, 10 kW |
| 机架宽度: | Full Rack |
| 高度（英寸）: | 4U |
| 通信接口: | Analog |
| 流程应用: | Reactive sputtering |
