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Navigator II

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Rapid, Accurate, and Reliable Digitally-Tuned Matching

The Navigator® ll is equipped with microprocessor-controlled, stepper-motor drives, and advanced tuning algorithms, enabling optimized RF power. An optional internal Z’Scan® II RF sensor provides real-time analysis of process power and impedance, allowing you to quickly identify and significantly reduce process variability. Optional Virtual Front Panel software is available for monitoring and control through a user’s computer.

特徴

  • Digital architecture with enhanced tuning algorithms
  • Pulsed-RF power delivery
  • Sweep-frequency operation
  • Intermodulation distortion (IMD) immunity for multi-frequency applications
  • Real-time process power and impedance measurement

メリット

  • Speeds tuning/matching response time
  • Tightens process control
  • Helps increase tool throughput and product yield

仕様

冷却: Hybrid (air and water)
出力周波数(MHz、kHz): 400 kHz to 60 MHz
入力電圧 (V): 110 VAC
出力レベル(kW): 1 to 60 kW
ラック幅: N/A, chamber mounted
通信インターフェース: EtherCAT, Ethernet, DeviceNet, RS-232
高度な機能: Pulsing, CEX
プロセスアプリケーション: Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE
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