eVoS™ LE | Advanced Energy
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eVoS™ LE

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Asymmetric Bias Waveform Generator for Direct Control of Substrate Voltage and Ion Energy

The eVoS™ LE is an asymmetric bias waveform generator designed to achieve direct control of wafer-surface voltage and resulting ion energy distributions (IED) in plasma-based etch and deposition processes. The eVoS system consists of a bi-directional voltage supply combined with an independent current source to establish and control wafer-surface potential. The asymmetric output of the eVoS eliminates the limitations and restrictions of wafer biasing inherent to sinusoidal RF bias application. Fast digital metrology and novel control algorithms enable the production of near mono-energetic IEDs. Use additional parameters for customizing average and time-varying aspects of the wafer surface voltage and resulting ion energy distribution.

特徴

  • Ability to produce near mono-energetic ion energy distributions
  • Pulse capability with necessary input and output signals for synchronization
  • Integrated design and compact size eliminates need for matching network
  • High-speed metrology provides real-time bias voltage and ion current feedback
  • Narrow, broad, and multi-peak distributions
  • Adaptable to standard chamber interface

メリット

  • Achieve direct control of wafer bias voltage and resulting ion energies
  • Gain enhanced ion energy selection/discrimination when compared to a RF bias method
  • Significantly increase etch selectivity for shorter processes and straighter, deeper features
  • Use less power by using the “right power,” only delivering the useful ion energy
  • Simplify bias power integration

仕様

冷却: Hybrid (air and water)
出力周波数(MHz、kHz): 400 kHz
入力電圧 (V): 185 to 260 VAC
ラック幅: Chamber Mount and Full Rack
出力電圧範囲 (V): 2250 V
通信インターフェース: EtherCAT, Ethernet
プロセスアプリケーション: Etch
ピーク電流 (A): 1.4
すべての仕様 仕様の崩壊

技術文書

タイトル タイプ
eVos LE Data Sheet (3 MB) データシート
Forward and Reflected Power: What Does It Mean? (576 KB) ホワイトペーパー

サービス

Field services and On-Site Training

Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.

PowerInsight

Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.

Repair

Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.

Agreement Term Options

Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

Agreement Term Options

Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

Agreement Term Options

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