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UV 400 & UVR 400 Pyrometers
Digital pyrometers with extremely short wavelength for true Wafer Surface Temperature and Reflectance Instrumentation for GaN-based MOCVD epitaxy processes. Temperature range 650 to 1300 °C.
Designed specifically for GaN-based MOCVD epitaxy processes, the UV 400 and UVR 400 systems offer direct measurement of wafer surface temperature, a marked improvement over the traditional susceptor/pocket temperature measurement, leading to enhanced yield. The UVR 400 goes a step further, incorporating an additional reflectometer at 635 nm, operating at a measurement speed of 0.5 kHz, facilitating the measurement of deposition thickness. These systems redefine the standards for LED production processes, with results showcasing a reliable correlation between process temperature and the final product wavelength.
特徴
- Reliable wafer temperature with PL wavelength correlation
- Device withstands an atmosphere of nitrogen and a vacuum (< 10 mbar)
- Adjustable subrange within the temperature range
- Minimize noise in measurement using true photocounting instrumentation
- Complete solution for reactor temperature control with PhotriX and concentric lightpipe options
メリット
- Improve yield via accurate true wafer temperature measurement
- Measure temperature directly on the GaN layer using UV wavelength instrumentation
- Obtain reliable wafer temperature with PL wavelength correlation
- Capture real-time reflectance measurement using a fast pulsing light source
- Prevent residue temperature oscillation as seen in NIR emissivity-compensated pyrometers
- Prevent data skew due to delayed sampling (no shutter on and off)
仕様
| 動作温度範囲 (°C): | 650 to 1300 °C |
|---|---|
| スペクトル範囲 (µm): | 0.383 to 0.410 |
| 測定の不確かさ (°C): | From 3 °C |
| 光学系 (mm): | Fixed optics |
| FOV（最小スポットサイズ）（mm）: | Min 8:1 (9.8) |
| アライメント／照準: | None |
| インターフェース/出力（mA）: | 0/4 to 20 mA |
| 露光時間 t90 (ms): | 8 ms |
アクセサリー
Impac Other Electrical
Other Electrical Accessories Compatible With Impac Pyrometers
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Calibration and Alignment
Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications. Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Repair
Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Service Agreements
Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Total Service Package
We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
