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Luxtron® M-1100 Fiber Optic Temperature Converter

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Fiber optic temperature sensing for semiconductor in etch and deposition applications

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The Advanced Energy's Luxtron^® M-1100 is the latest FluorOptic^® thermometry (FOT) converter platform, featuring an advanced light source and improved ultralow noise electronics. Two new proprietary phosphor formulations VioLux^TMand RubiLux^TMhave been developed to deliver 0.5°C accuracy, repeatability, and stability over an extended range -200 to 450°C.

特徴仕様技術文書ソフトウェア Videos Support

特徴

Wide supported temperature range
Low noise level with fast response rate
5 channels in a single converter
Flexible communication outputs
EtherCAT Interface (optional)
Analog output

メリット

Non-contact measurement to minimize the thermal offset
Easy to install into OEM equipment
Achieve high accuracy and a extreme temperature control for different etching and wafer fab processes
Receive support from experienced applications engineers to customize probes for OEMs

仕様

動作温度範囲 (°C):	5 to 60
チャンネル数:	Up to 5
精度:	± 0.5 °C
騒音 (°C):	≤ 0.05 °C
測定範囲:	-200 to 450
通信インターフェース:	ECAT, 4 to 20 mA or 0 to 10 V
読み出し速度（Hz）:	1 to 50
ソフトウェア:	TrueTemp+

技術文書

Product Information Documents

Engineering Resources New

Insights & Studies New

ソフトウェア

TrueTemp+

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テクニカル・ビデオ

Putting FluorOptic® to Work

12月 15, 2025

This video gives an overview of AE Fluorotic Probes, highlighting their reliable and accurate temperature sensing in tough environments. It covers the Luxtron M-1100 & M-1200 Series System and various probes, including medical-grade, rugged, and high-temperature options. Instructions are provided for measuring temperatures on surfaces and in liquids. The guide is aimed at professionals needing consistent temperature monitoring in industrial and medical settings.

比較する

Model	Luxtron M-1100	Luxtron M900	WaveCapture FBG Analyzer Series
チャンネル数	Up to 5	4 to 64	1
精度	± 0.5 °C	±0.5 to ± 0.1 °C	+/-5 pm
騒音 (°C)	≤ 0.05 °C	< 0.1 °C	1 pm
通信インターフェース	ECAT, 4 to 20 mA or 0 to 10 V	RS232, RS485	USB 2.0, RS232, Ethernet IEEE 802.3