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Navio Match Network

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Economical, Digital, Configurable Matching Network Solution

The Navio matching network delivers quick, accurate, and repeatable impedance across many applications.
  • Plug-and-play installation with Advanced Energy’s RF power supplies for thin film applications
  • Efficient and stable power delivery
  • Compact and air-cooled

特徴

  • Quick, accurate, and repeatable impedance matching
  • Optimized, off-the-shelf functionality for many applications
  • Generous menu of configuration options for more sophisticated processes
  • Wide power
  • Compact air-cooled unit 

メリット

  • Improve throughput, increase yield, and reduce production costs
  • Choose a standard model or configure a unit that meets your system requirements
  • Install and operate with ease
  • Obtain excellent repeatability for high process yield

仕様

冷却: Air
出力周波数(MHz、kHz): 13 MHz
入力電圧 (V): 24 VDC or 110 VAC
出力レベル(kW): 1 to 5 kW
ラック幅: N/A, chamber mounted
通信インターフェース: Analog, RS 232
プロセスアプリケーション: Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE

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Premium Services

Combine services into a cost-effective plan including warranties, on-site visits, and more.

Repair

Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.

Calibration and Alignment

Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications.  Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards​.

Refurbishments

Choose refurbishment over repair to minimize down time, extend life, and reduce the total cost of ownership of your mature power products.

Upgrades & Enhancements

Take advantage of the latest engineering innovations to optimize long-term product performance. Add custom-engineered solutions to utilize new feature sets and functionality

Trade In

Leverage your original investment and reduce the cost of a new unit by trading in your old unit.

Used Equipment

We have a catalog of high-quality current, and legacy used products that have been fully tested and maintained. These products are covered under warranty with options available for extended warranty as well.

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