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Solvix® DC and Pulsed Power Supply
Active
3 to 30 kW DC and Pulsed-DC Power Supplies
Solvix DC and pulsed-DC power supplies for metallic and reactive sputtering provide precise control and proven reliability—backed by AE’s worldwide support network. Offering a wide range of power and frequency levels, pulsing, and multiple communications options, they offer a rugged and cost-effective solution for your unique process.
特徴
• Best-in-class arc handling
• DC and pulsed-DC units
• Current, power, and voltage regulation modes
• Flexible architecture
• Air cooling
• Multiple units configurable for high-power requirements
• High peak-to-peak voltages (high-frequency models)
• Patented tapless wide output load impedance range (medium-frequency models)
• DC and pulsed-DC units
• Current, power, and voltage regulation modes
• Flexible architecture
• Air cooling
• Multiple units configurable for high-power requirements
• High peak-to-peak voltages (high-frequency models)
• Patented tapless wide output load impedance range (medium-frequency models)
メリット
• Proven reliability, accuracy, and repeatability
• Worldwide support network
• Reduced substrate damage and process contamination
• Adaptability to a wide range of process requirements
• High throughput
• Worldwide support network
• Reduced substrate damage and process contamination
• Adaptability to a wide range of process requirements
• High throughput
仕様
| 冷却: | Air |
|---|---|
| 出力周波数（MHz、kHz）: | Pulsing and non-pulsing options available. Please refer to Datasheet. |
| 入力電圧 (V): | 400, 480 VAC |
| 出力レベル（kW）: | Multiple options available. Please refer to Datasheet. |
| ラック幅: | Full Rack |
| 高さ（インチ）: | 4U, 6U |
| 通信インターフェース: | Analog, Profibus, EtherCat, RS-485 |
| プロセスアプリケーション: | Hard coating |
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